Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

MCS1001CD100H13

Product ID: MCS1001CD100H13
Unit of Measure
1/EA
Min Order Qty
1

5EYD11370-3U001ZJ-087

Product ID: 5EYD113703U0S00001
Unit of Measure
1/EA
Min Order Qty
1

S/W FILTER CRTDG, INDUSTRIAL POLYPROPYLE

Product ID: FF FEP20R40P
Unit of Measure
15/EA
Min Order Qty
15

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 Inches, EPDM

Product ID: PFT340UE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
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Duo-Fine® II, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Fluorocarbon Elastomer

Product ID: DFNT1040UVM18
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Change Out Differential Pressure
2.4 bard
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WCN80-20U001ZJ-MOD-G

Product ID: WCN8020U001ZJMODG
Unit of Measure
1/EA
Min Order Qty
1

MCC1401E500H

Product ID: MCC1401E500H
Unit of Measure
6/EA
Min Order Qty
6

5ESC10770-2U001ZJ-004

Product ID: 5ESC107702U0S00016
Unit of Measure
1/EA
Min Order Qty
1

WCN80-20-K0045ZJ

Product ID: WCN8020K0045ZJ
Unit of Measure
1/EA
Min Order Qty
1

HDC® II Filter Cartridges, Length 20 inches

Product ID: AB2J0063H1
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
0.6 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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ELEMENT 8" U6-40Z 5 MICRON product photo

ELEMENT 8" U6-40Z 5 MICRON

Product ID: CA41077D08
Unit of Measure
1/EA
Min Order Qty
1

Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: DFNT140UVM8
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
End Configuration
SOE fin end, external 222 O-rings
Change Out Differential Pressure
2.4 bard
737 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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