Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Membrane Material

Regenerated Cellulose

Supracap™ 50 depth filter capsule with dual-layer media grade PDK11 (2-20 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDK11 (2-20 µm retention rating) and luer-lock connections

Product ID: SC050PDK11
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
2-20 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
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Supracap™ 50 depth filter capsule with dual-layer media grade PDH4 (0.5-15 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDH4 (0.5-15 µm retention rating) and luer-lock connections

Product ID: SC050PDH4
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
0.5-15 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
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Supracap™ 50 depth filter capsule with dual-layer media grade PDK5 (1.5-20 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDK5 (1.5-20 µm retention rating) and luer-lock connections

Product ID: SC050PDK5
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
1.5-20 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with dual-layer media grade PDP8 (6-30 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDP8 (6-30 µm retention rating) and luer-lock connections

Product ID: SC050PDP8
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
6-30 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
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Supracap™ 50 depth filter capsule with single-layer media grade EKMP (0.2-0.5 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade EKMP (0.2-0.5 µm retention rating) and luer-lock connections

Product ID: SC050PEKM
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
0.2-0.5 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with single-layer media grade EKSP (0.1-0.3 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade EKSP (0.1-0.3 µm retention rating) and luer-lock connections

Product ID: SC050PEKS
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
0.1-0.3 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
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Supracap™ 50 depth filter capsule with single-layer media grade V100P (2-4 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade V100P (2-4 µm retention rating) and luer-lock connections

Product ID: SC050V100
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
2-4 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
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Supracap™ 50 depth filter capsule with activated carbon type AKS1 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS1 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections

Product ID: SC050XAK1
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with activated carbon type AKS4 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS4 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections

Product ID: SC050XAK4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with activated carbon type AKS6 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS6 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections

Product ID: SC050XAK6
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with activated carbon type AKS5 (typical target contaminant molecular weight 200-400 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS5 (typical target contaminant molecular weight 200-400 Da) and luer-lock connections

Product ID: SC050XAK5
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with activated carbon type AKS7 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS7 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections

Product ID: SC050XAK7
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
26 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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