Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Cartridge Length (Imperial)

30 in

Product Type

Filter Cartridges

Gasket / O-Ring Material

Fluorocarbon Elastomer

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: PFT04530UVM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, DOE industrial

Product ID: PFT330UV
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer

Product ID: CLR7530M3V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, DOE industrial

Product ID: PFT1030UV
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT20030UM3V
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: PFT02530UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm

Profile® UP, Filter Cartridges, Removal Rating 10 μm, , Length 30 Inches

Product ID: AB3UY1003H
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: NXA530UM8V
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron

Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer

Product ID: ARD130UVM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: PFT330UVM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm

Poly-Fine® II Filter Cartridges, Removal Rating 10 μm, Length 30 inches, Fluorocarbon Elastomer

Product ID: QMPT100300UVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: PFT04530UVM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
43 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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