Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Nexis®

Industries

Oil & Gas

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches

Product ID: NXT110U
Unit of Measure
30/EA
Min Order Qty
30
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXA1020UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 16.25 inches

Product ID: NXT2001625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT530UM7S
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, FEP encapsulated fluorocarbon elastomer Orings product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, FEP encapsulated fluorocarbon elastomer Orings

Product ID: NXA2030UM8F
Unit of Measure
12/EA
Min Order Qty
12
Micron
20 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches

Product ID: NXT539UH21
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA530UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT120UM7S
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA120UM3S
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches

Product ID: NXT20030U
Unit of Measure
20/EA
Min Order Qty
20
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXT330UM3S
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 micron
Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXA3020U
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron
163 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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