Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

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AB1Y0303J

Product ID: AB1Y0303JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

Y700FS10

Product ID: Y700FS10TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: R3F400
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
R type housing
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This product is currently not available. Please contact us for more information.

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: RM1F700H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
70 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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AB1P00319J

Product ID: AB1P00319JTIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Filter 40" Profile II 0,5µm product photo

Filter 40" Profile II 0,5µm

Product ID: AB4Y0057J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

AB3NFP319J 906

Product ID: AB3NFP319J906
Unit of Measure
24/EA
Min Order Qty
24

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: RM298F030H21TIMMD
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes
Filter 10" Profile Star 10µm product photo

Filter 10" Profile Star 10µm

Product ID: AB1A1007J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Profile® II, Filter Cartridges, Polypropylene, Length 40 Inches

Product ID: R4F030
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
End Configuration
R type housing
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WF4P10018H13

Product ID: WF4P10018H13TIMMD
Unit of Measure
12/EA
Min Order Qty
12

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: RM298F400H21
Unit of Measure
48/EA
Min Order Qty
48
Removal Rating
40 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes
595 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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