Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

20µm, 20", Code 7, F&B

Product ID: AB2A2007WJ
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Profile® II Filter Cartridge

Product ID: HC3310FGR13Z
Unit of Measure
1/EA
Min Order Qty
1

AB1PYN18J

Product ID: AB1PYN18J
Unit of Measure
1/EA
Min Order Qty
1

R29F400

Product ID: R29F400
Unit of Measure
12/EA
Min Order Qty
24

Profile® Nylon, Filter Cartridges, Removal Rating 20 μm, Nylon, Length 40 Inches

Product ID: RGN4FN200
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1020 mm
Cartridge Length (Metric)
102 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® II Nylon Filter Cartridge

Product ID: HC3310FGN20Z
Unit of Measure
12/EA
Min Order Qty
12

Filter 10" Profile Star 5µm

Product ID: AB1A0503J
Unit of Measure
1/EA
Min Order Qty
1

Filter 40" Profile II 5µm

Product ID: AB4Y05018J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

40" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGP40Z
Unit of Measure
12/EA
Min Order Qty
24

Profile® Nylon, Filter Cartridges, Removal Rating 70 μm, Nylon, Length 10 Inches

Product ID: RGN1FN700NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
70 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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CTRG WF4 PROFILE C18 200 H13

Product ID: WF4P20018H13
Unit of Measure
12/EA
Min Order Qty
12

FILTER

Product ID: ABGN1FN0507H13
Unit of Measure
12/EA
Min Order Qty
12
538 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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