Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Food & Beverage

Seitz® K Series Depth Filter Sheets, K 200 200x200

Product ID: B08274
Unit of Measure
400/EA
Min Order Qty
400
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
0.42 ft²
Filter Area (Metric)
0.04 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
7.8 x 7.8 in
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Seitz® K Series Depth Filter Sheets, SEITZ-EKS 200x200

Product ID: B08456
Unit of Measure
400/EA
Min Order Qty
400
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
0.42 ft²
Filter Area (Metric)
0.04 m²
Hot Water Sanitization
90 °C
Recommended max.dp
1.5 bar
Size (Imperial)
7.8 x 7.8 in
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Seitz® K Series Depth Filter Sheets, for Microorganism Reduction, SEITZ-EKS 400x400

Product ID: B08328
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
1.5 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® K Series Depth Filter Sheets, K 100 400x400

Product ID: B07573
Unit of Measure
1/EA
Min Order Qty
1
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® K Series Depth Filter Sheets, K 800 400x400

Product ID: B08742
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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PREcart PP II Filter Cartridges, 2 µm, 30 in, Silicone Elastomer, 499A120W073SP

Product ID: B12437
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
2 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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PREcart PP II Filter Cartridges, 1 µm, 30 in, Silicone Elastomer, 499A110W083SP

Product ID: B14401
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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Seitz® IR Series Depth Filter Sheets, K 100 IR 600x612

Product ID: B21619
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Size (Imperial)
23.6 x 24.1 in
Size (Metric)
600 x 612 mm
Food Contact Compliant
Yes
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This product is currently not available. Please contact us for more information.

Flat gasket, Silicone 53/70x5mm, blue

Product ID: B7709010014
Unit of Measure
1/EA
Min Order Qty
1

10µm, 20", DOE (no seal) F&B

Product ID: CLR1020W480
Unit of Measure
24/EA
Min Order Qty
24

CLR 10-30-M7WS 480

Product ID: CLR1030M7WS480
Unit of Measure
12/EA
Min Order Qty
12

Claris® Filter Cartridge, 10 µm, 30 in, Double Open Ended with No Endcaps

Product ID: CLR1030W480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Change Out Differential Pressure
2.4 bard
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410 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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