Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

13 in

Product Use

Lube and Hydraulic Oil Filtration

Athalon, 145psi Simplex Hsg, 2in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: UT310D3213ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (3000 #)
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
145 psi
Port Size
2 in
Number of Cartridges
1
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UT310A2413ZB ASSY HOUSING

Product ID: UT310A2413ZB
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 145psi Simplex Hsg, 1.5in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: UT310C2413ZB
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1.5 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

Athalon, 1600psi Duplex Hsg, 1.25in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: UR229CC2013ZS00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
1600 psi
Port Size
1.25 in
Number of Cartridges
1 per side
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Athalon, 6000psi Simplex Hsg, 2in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310E3213ZC
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor, 6000psi Non-bypass Simplex Hsg, 1in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ9801G16TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor, 6000psi Non-bypass Simplex Hsg, 1in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ9801C16TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
151 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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