Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Seal Material

Fluorocarbon

Beta Rating

BETA 1000

Filter Media

Glass Fiber

Red1000 Glass Fiber 12 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC2289FRS28Z)

Product ID: HC2289FAS28Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2289
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 22 micron (Beta 1000) Fluorocarbon 14in 35.56cm (REPLACED BY HC2296FRT14Z50)

Product ID: HC2296FKT14Z50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
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HC2618FCT36Z ELEMENT

Product ID: HC2618FCT36Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
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Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Anti-Static Glass Fiber 3 micron (Beta 1000) Fluorocarbon 18in 45.72cm length (REPLACED BY HC2618FRZ18Z)

Product ID: HC2618FMZ18Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC8200FRN8ZYATD)

Product ID: HC8200FDN8ZYATD
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8200
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor SRT Glass Fiber 5 micron (Beta 1000) Fluorocarbon 16in 40.64cm (REPLACED BY HC8300FRP16Z)

Product ID: HC8300FAP16Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8300
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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This product is currently not available. Please contact us for more information.

Ultipor SRT Glass Fiber 5 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC8300FRP8Z)

Product ID: HC8300FAP8Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8300
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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This product is currently not available. Please contact us for more information.

Ultipor SRT Glass Fiber 3 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC8300FRZ8Z)

Product ID: HC8300FAZ8Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8300
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Fluorocarbon 16in 40.64cm (REPLACED BY HC8300FRP16Z)

Product ID: HC8300FKP16Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8300
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor SRT Glass Fiber 3 micron (Beta 1000) Fluorocarbon 16in 40.64cm (REPLACED BY HC8304FRZ16Z)

Product ID: HC8304FAZ16Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8304
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
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This product is currently not available. Please contact us for more information.

Ultipor SRT Glass Fiber 7 micron (Beta 1000) Fluorocarbon 39in 99.06cm (REPLACED BY HC8304FRN39ZYN09)

Product ID: HC8304FMN39ZYN09
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8304
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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This product is currently not available. Please contact us for more information.

Ultipor SRT Glass Fiber 3 micron (Beta 1000) Fluorocarbon 16in 40.64cm (REPLACED BY HC8314FRZ16Z)

Product ID: HC8314FAZ16Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8314
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
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This product is currently not available. Please contact us for more information.

199 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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