Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Material of Construction

Iron|Steel

Seal Material

Fluorocarbon

Athalon, 6000psi Simplex Hsg, 1.5in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UH310A2408ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310A2413ZC
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310A2413ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.25in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310A2013ZC
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UH310A2408ZC
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 2in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310A3213ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.25in SAE Ports, 20in Length, Fluorocarbon Seals

Product ID: UH310A2020ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in SAE Ports, 20in Length, Fluorocarbon Seals

Product ID: UH310A2420ZC
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

UH310A2013ZG ASSY HOUSING

Product ID: UH310A2013ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1in Flange Ports, 4in Length, Fluorocarbon Seals

Product ID: UH210E1604ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Non-bypass Simplex Hsg, 1.5in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310A2413ZN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310A2413ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes
341 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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