Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Media

Polypropylene

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: CLR2040M3N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, SOE plastic spring assembly saw cut end

Product ID: CLR140XK
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene

Product ID: CLR205
Unit of Measure
120/EA
Min Order Qty
120
Length
12.7 cm / 5 in
Micron
20 micron

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR2030M7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.75 inches

Product ID: CLR20975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
20 micron
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 19.5 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 19.5 inches

Product ID: CLR30195
Unit of Measure
24/EA
Min Order Qty
24
Length
49.5 cm / 19.5 in
Micron
30 micron
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches

Product ID: CLR209875
Unit of Measure
36/EA
Min Order Qty
36
Length
25.1 cm / 9.875 in
Micron
20 micron

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: CLR3030H21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 inches

Product ID: CLR3040
Unit of Measure
1/EA
Min Order Qty
1
Length
102 cm / 40 in
Micron
30 micron

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: CLR303040
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 inches, EPDM

Product ID: CLR3040M3E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
EPDM
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Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 inches, Nitrile

Product ID: CLR3040M3N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
See All Attributes
944 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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