Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

ELEMENT 16" U200Z 25 MICRON product photo

ELEMENT 16" U200Z 25 MICRON

Product ID: CA41074D02
Unit of Measure
1/EA
Min Order Qty
1
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 Inches, silicone product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 Inches, silicone

Product ID: PFT3010USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Filtre Junior HDC II 2.5µm

Product ID: MCY4463J025J
Unit of Measure
12/EA
Min Order Qty
12

MCS1001U100ZH13

Product ID: MCS1001U100ZH13
Unit of Measure
12/EA
Min Order Qty
12

DFAC2 Cap HDC II J100 SW84M (24 box)

Product ID: DFAC2J100SW84M
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CRTG PUY4J006Y1

Product ID: PUY4J006Y1
Unit of Measure
12/EA
Min Order Qty
12

Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone,Dual 226 size O-rings bayonet lock finned end

Product ID: AB3U010Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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DFNT 0.45-30UT-M3

Product ID: DFNT04530UTM3
Unit of Measure
12/EA
Min Order Qty
12
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT04540USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Fluorodyne® II Filter Cartridges, AB3FSD7WH4

Product ID: AB3FSD7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Hydrophilic polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric cm²)
1.65 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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Ultipor® GF Plus Filter Cartridges, Removal Rating 1 μm, Length 20 inches

Product ID: AB2U010Z7H15
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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This product is currently not available. Please contact us for more information.

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial

Product ID: PFT1010UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
1,321 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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