Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

Cartridge Length (Metric)

762 mm

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches

Product ID: NXT330UG744
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Type
NXT
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DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 30 inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 30 inches, 304 stainless steel

Product ID: C200AW30A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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Duo-Fine® II, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Fluorocarbon Elastomer

Product ID: DFNT1030UVM3
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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This product is currently not available. Please contact us for more information.

Poly-Fine® II Filter Cartridge, PFT530USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT530USM7W480

Product ID: PFT530USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 µm

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: NXT5030UM8V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches, silicone

Product ID: CLR7530M7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: R3F400
Unit of Measure
6/EA
Min Order Qty
6
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
R type housing
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This product is currently not available. Please contact us for more information.

HDC® II, Filter Cartridges, Removal Rating 1.2 μm, Length 30 Inches

Product ID: AB3J0123J
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
1.2 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 3
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, SOE plastic spring assembly saw cut end

Product ID: CLR130XK
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, EPDM, SOE fin end external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, EPDM, SOE fin end external 226 O-rings

Product ID: NXT0530UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: RM298F030H21TIMMD
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: PFT02530UVM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
585 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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