Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Metric)

508 mm

Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 20 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 20 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings

Product ID: PFT10020UTM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer, DOE industrial

Product ID: PFT02520UV
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, silicone, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, silicone, SOE flat closed end external 222 O-rings

Product ID: PFT02520USM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches, silicone

Product ID: NXA4020UM3S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, Polypropylene, Nitrile, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, Polypropylene, Nitrile, Bulk packaging

Product ID: U001AW20UNM3
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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Profile® UP Filter Cartridges, Removal Rating 20 μm, Length 20 inches, silicone

Product ID: AB2UY2007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Profile® UP Filter Cartridges, Removal Rating 30 μm, Length 20 inches, silicone

Product ID: AB2UY3007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
30 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT120UM3V
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, EPDM, SOE fin end external 226 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, EPDM, SOE fin end external 226 O-rings

Product ID: NXA520UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXA320UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 micron

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 222 O-rings

Product ID: CLR120M8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, Fluorocarbon Elastomer, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN120AV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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513 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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