Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Gasket / O-Ring Material

NA

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal

Product ID: NXT1040UH21
Unit of Measure
20/EA
Min Order Qty
20
Micron
10 micron

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal

Product ID: NXT2040UH21
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches

Product ID: CLR209875
Unit of Measure
36/EA
Min Order Qty
36
Length
25.1 cm / 9.875 in
Micron
20 micron
NXA 50-20U product photo

Nexis, NXA, 50 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXA5020U
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 micron
Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 29.25 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 29.25 inches, DOE Santoprene gasket seal

Product ID: NXA32925UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXA520U
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron

Nexis® A Series Filter Cartridges, Polypropylene, Length 20 inches, DOE industrial

Product ID: NXA720U
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
End Configuration Code
BLANK
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Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches

Product ID: CLR3030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
30 micron
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches

Product ID: NXT130U
Unit of Measure
10/EA
Min Order Qty
10
Micron
1 micron
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: CLR130
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
1 micron

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, DOE Santoprene gasket seal

Product ID: NXA11UH21
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
1 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
NA
End Configuration Code
H21
End Configuration
H21 - DOE, Santoprene gasket seal
Cartridge Type
NXA
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Discontinued

This part is no longer available. Please contact us for more information.

Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches

Product ID: CLR310
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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382 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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