Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, silicone, DOE with elastomer gasket seals and end caps

Product ID: NXT0520UDOES
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 222 O-rings, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 222 O-rings, No Bubble Test

Product ID: PFT530USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium

Product ID: RM2F007H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
0.7 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, silicone, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, silicone, DOE industrial

Product ID: PFT210US
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 29.25 inches

Product ID: NXA302925U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
See All Attributes

Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: ARD510UEDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: R1F900
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches

Product ID: NXT20030U
Unit of Measure
1/EA
Min Order Qty
1
Micron
200 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 9.75 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 9.75 Inches, Fluorocarbon Elastomer

Product ID: PFT08975UVM10
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches

Product ID: CLR330
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
3 micron
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches

Product ID: CLR2010
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
20 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial

Product ID: PFT230UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
1,574 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English