Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Gasket / O-Ring Material

Fluorocarbon Elastomer

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT540NM3V181
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
End Configuration
M3 - SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0)4
Cartridge Type
NXT
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT540UM3V
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: NXT540UM8V
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT7510UM3V
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer

Product ID: CLR1020M3V
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: XLD1040UVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Poly-Fine® XLD Filter Cartridges, Polypropylene, Length 10 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: XLD3010UVM3
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: XLD310UVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer, DOE industrial

Product ID: PFT320UV
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 µm

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer

Product ID: CLR510DOEV
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 226 O-rings

Product ID: NXT1020UM6V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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