Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Nexis®

Product Type

Filter Cartridges

Gasket / O-Ring Material

NA

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 29.25 inches

Product ID: NXT2002925U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 inches

Product ID: NXT3010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
30 micron

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal

Product ID: NXT140UH21
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal

Product ID: NXT5040UH21
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 29.25 inches, DOE industrial (no end caps) product photo

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 29.25 inches, DOE industrial (no end caps)

Product ID: NXT752925U
Unit of Measure
10/EA
Min Order Qty
10
Micron
75 micron

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT7530UH21
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches

Product ID: NXT530U
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron
Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXA3030UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 9.75 inches

Product ID: NXT200975U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, DOE industrial (no end caps)

Product ID: NXT1295U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
1 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
NA
End Configuration Code
BLANK
End Configuration
BLANK - DOE industrial (no end caps)
Cartridge Type
NXT
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 29.25 inches

Product ID: NXA12925UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches

Product ID: NXT520U
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron
278 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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