Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Poly-Fine®

Industries

Industrial Manufacturing

Product Type

Filter Cartridges

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer, DOE industrial

Product ID: PFT520UV
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, Nitrile, DOE industrial 2.54 cm (1 in) extended core product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, Nitrile, DOE industrial 2.54 cm (1 in) extended core

Product ID: PFT0210UN1X
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm

Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: XLD1030USM7
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: PFT0830UVM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: PFT04530UVM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE flat closed end external 222 O-rings

Product ID: PFT0820UTM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, EPDM, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, EPDM, SOE fin end external 226 O-rings

Product ID: PFT210UEM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, EPDM, SOE fin end external 226 O-rings

Product ID: XLD320UEM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 1.2 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 1.2 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT1210UEM3643
Unit of Measure
1/EA
Min Order Qty
1
Micron
1.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, silicone, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, silicone, DOE industrial

Product ID: PFT02510US
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm

Poly-Fine® XLD Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 10 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: XLD7010UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
70 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings, Standard packaging product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings, Standard packaging

Product ID: PFT04510USM7425
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
620 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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