Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Ultipor

Ultipor Glass Fiber 5µm Chloroprene Seal 8in 20.32cm length

Product ID: HC9600FKP8P
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Ultipor Glass Fiber 12µm Ethylene Propylene Seal 8in 20.32cm length

Product ID: HC9606FDS8J
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9606
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor, 200psi Simplex Hsg, 2in BSP Ports, Nitrile Seals

Product ID: HH7502C32A1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Family
Ultipor
Pressure Rating
200 psi
Port Size
2 in
Number of Cartridges
2
Material of Construction
Cast Iron
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor, 400psi Simplex Hsg, 2.5in Flange Ports, 39in Length, Nitrile Seals

Product ID: HH8304F40XB2T
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
39 in
Family
Ultipor
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor, 400psi Simplex Hsg, 2.5in Flange Ports, 16in Length, Nitrile Seals

Product ID: HH8304F40UB2T
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor, 400psi Simplex Hsg, 2.5in Flange Ports, 39in Length, Nitrile Seals

Product ID: HH8314F40XA1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
39 in
Family
Ultipor
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor, 1200psi Duplex Hsg, 1in BSP Ports, 8in Length, Nitrile Seals

Product ID: HH8674C16SB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1 in
Number of Cartridges
1 per side
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Manifold Mount, 16in Length, Nitrile Seals

Product ID: HH9681S20UW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor, 6500psi Simplex Hsg, 1in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ4510C16SB9YE47
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1 in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor, 6500psi Non-bypass Simplex Hsg, 1in Flange Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ4511G16SW9YE47
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1 in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor, 6500psi Non-bypass Simplex Hsg, 1.5in Flange Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ4711G24UW9YE47
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor, 6000psi Non-bypass Simplex Hsg, 1in Flange Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ9801G16SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.
171 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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