Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Gasket / O-Ring Material

NA

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXA320UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 29.25 inches, DOE industrial (no end caps)

Product ID: NXA32925U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches

Product ID: NXA330U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 29.25 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 29.25 inches, DOE Santoprene gasket seal

Product ID: NXA32925UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 micron

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 39 inches

Product ID: NXA339U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
39 in
Cartridge Length (Metric)
991 mm
Cartridge Length (Metric)
99.1 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 9.75 inches

Product ID: NXA3975U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 19.5 inches

Product ID: NXA40195U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches

Product ID: NXA4020U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
40 micron
Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 inches

Product ID: NXA4010U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
40 micron

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches

Product ID: NXA4030U946
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal

Product ID: NXA4040UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
40 micron
Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 9.75 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 9.75 inches

Product ID: NXA40975U
Unit of Measure
30/EA
Min Order Qty
30
Micron
40 micron
393 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile II Filters for CMP Applications

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