Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

10 in

Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, FEP encapsulated fluorocarbon elastomer Orings, SOE fin end external 226 O-rings

Product ID: XLD1010UFM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Nitrile, DOE industrial

Product ID: XLD1010UNNET
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
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Discontinued

This part is no longer available. Please contact us for more information.

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: RM1F200H21
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
20 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 10 inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 10 inches

Product ID: C200A10T
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT0210USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps)

Product ID: NXA2010U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
20 micron

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT2510UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
25 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 10 inches, silicone, DOE with elastomer gasket seals and end caps

Product ID: NXT20010UDOES
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, Expanded PTFE gaskets FEP encapsulated silicone Orings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, Expanded PTFE gaskets FEP encapsulated silicone Orings

Product ID: NXA110UM3T
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
NXA 0.5-10U-M7S product photo

Nexis, NXA, 0.5 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA0510UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Bleached cotton, Length 10 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Bleached cotton, Length 10 Inches, 304 stainless steel

Product ID: C010A10A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, silicone, DOE industrial, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, silicone, DOE industrial, No Bubble Test

Product ID: PFT04510US
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
552 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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