Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Nexis®

Gasket / O-Ring Material

NA

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 inches

Product ID: NXT30975U
Unit of Measure
30/EA
Min Order Qty
60
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
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Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches

Product ID: NXT3020U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
30 micron
Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT3030UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 micron

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.875 inches

Product ID: NXT309875U
Unit of Measure
30/EA
Min Order Qty
60
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 19.5 inches, DOE Santoprene gasket seal

Product ID: NXT3195UH21
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 19.5 inches

Product ID: NXT3195U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXT320UH21
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 29.25 inches

Product ID: NXT32925U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene

Product ID: NXT3295U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
3 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
NA
End Configuration Code
BLANK
End Configuration
BLANK - DOE industrial (no end caps)
Cartridge Type
NXT
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Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT330UH21
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 9.75 inches, DOE Santoprene gasket seal

Product ID: NXT3975UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXT330U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
3 micron
272 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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