Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Duo-Fine®

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches, silicone, SOE flat closed end external 222 O-rings

Product ID: DFNT0210USM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

Discontinued

This part is no longer available. Please contact us for more information.

Duo-Fine® II, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, SOE fin end external 226 O-rings

Product ID: DFNT130UEM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
End Configuration
SOE fin end, external 226 O-rings
Change Out Differential Pressure
2.4 bard

This product is currently not available. Please contact us for more information.

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 20 Inches, silicone, SOE fin end external 226 O-rings

Product ID: DFNT0220USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
End Configuration
SOE fin end, external 226 O-rings
Change Out Differential Pressure
2.4 bard

Discontinued

This part is no longer available. Please contact us for more information.

Duo-Fine® II, Filter Cartridges, Removal Rating 1 μm

Product ID: DFNT12UE147
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.6 in
Cartridge Outer Diameter (OD) (Metric)
6.6 cm
Gasket O-Ring Code
E
Packaging Type
Standard packaging
See All Attributes

This product is currently not available. Please contact us for more information.

Duo-Fine® II, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, silicone, SOE fin end external 226 O-rings

Product ID: DFN110USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
End Configuration
SOE fin end, external 226 O-rings
Change Out Differential Pressure
2.4 bard

Discontinued

This part is no longer available. Please contact us for more information.
PFPT840UTM7-CA product photo

PFPT840UTM7-CA

Product ID: PFPT840UTM7CA
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

198 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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