Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Profile®

Product Sub Type

Depth Filters

Product Type

Filter Cartridges

R1F1200

Product ID: R1F1200TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

RM2F007H21-COA

Product ID: RM2F007H21COATIMMD
Unit of Measure
1/EA
Min Order Qty
1

R3F005

Product ID: R3F005TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24

CTRG ABGN4 PRFL C18 N200H

Product ID: ABGN4N20018H
Unit of Measure
12/EA
Min Order Qty
12

ME3310FPY40H 132

Product ID: ME3310FPY40H132
Unit of Measure
12/EA
Min Order Qty
12

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: RM1F150H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
15 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Profile® II Filter Cartridge

Product ID: HC3310FGT40H
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

HC3300FNN40M

Product ID: HC3300FNN40M
Unit of Measure
1/EA
Min Order Qty
1

Profile® II Filter Cartridges, Polypropylene, Length 20 inches, EPDM

Product ID: AB2Y10018J
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
506 mm
Cartridge Length (Metric)
50.6 cm
Gasket / O-Ring Material
EPDM
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: RM1F200H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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PROFILE ELEMENT

Product ID: HC3300FHD30M
Unit of Measure
1/EA
Min Order Qty
1

20" RMF M GRADE SANTOPRENE

Product ID: RM2FYMH21
Unit of Measure
24/EA
Min Order Qty
24
474 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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