Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

AB1Y0103H13

Product ID: AB1Y0103H13TIMMD
Unit of Measure
1/EA
Min Order Qty
1

AB4NP10019J

Product ID: AB4NP10019J
Unit of Measure
1/EA
Min Order Qty
1

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: R2FYN
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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AB2P30018H1

Product ID: AB2P30018H1TIMMD
Unit of Measure
24/EA
Min Order Qty
24

5EC4888389200J

Product ID: 5EC4888389200J
Unit of Measure
1/EA
Min Order Qty
1

Profile® Nylon, Filter Cartridges, Removal Rating 20 μm, Nylon, Length 20 Inches

Product ID: RGN2FN200
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® Star, Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 30 Inches, silicone, Polypropylene Core

Product ID: AB3A0157H4
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Filter 20" Profile Star 1,5µm Food & Bev

Product ID: AB2A0157WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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This product is currently not available. Please contact us for more information.

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: R3F002
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
R type housing
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This product is currently not available. Please contact us for more information.

UNICAP 20" PROFILE STAR 1µm product photo

UNICAP 20" PROFILE STAR 1µm

Product ID: PUY2A010J
Unit of Measure
6/EA
Min Order Qty
6

R19F300

Product ID: R19F300TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

Profile® Nylon, Filter Cartridges, Removal Rating 90 μm, Nylon, Length 20 Inches

Product ID: RGN2FN900
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
90 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
See All Attributes
538 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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