Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

Product Sub Type

String Wound Filters

Product Type

Filter Cartridges

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 40 Inches, 304 stainless steel, with Extended Core product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 40 Inches, 304 stainless steel, with Extended Core

Product ID: U05AW40ACEC1A
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DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 40 Inches, Polypropylene, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 40 Inches, Polypropylene, Individually wrapped

Product ID: U050AW40U1PK
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1/pkg
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Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 30 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 30 Inches, Polypropylene

Product ID: U05AW30UC
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DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 20 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 20 Inches, Polypropylene

Product ID: U05AW20UC
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DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 20 Inches, Polypropylene, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 20 Inches, Polypropylene, Individually wrapped

Product ID: U05AW20U1PK
Unit of Measure
1/pkg
Min Order Qty
1
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Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 10 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 10 Inches, Polypropylene

Product ID: U075A10U
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DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 20 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 20 Inches, Polypropylene

Product ID: U075AW20U
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DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, Polypropylene

Product ID: U100A10U
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DFT Classic®, Filter Cartridges, Removal Rating 150 μm, Length 20 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 150 μm, Length 20 Inches, Polypropylene

Product ID: U150AW20U
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DFT Classic®, Filter Cartridges, Removal Rating 150 μm, Length 10 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 150 μm, Length 10 Inches, Polypropylene

Product ID: U150A10U
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DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 30 Inches, 304 stainless steel, with Extended Core product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 30 Inches, 304 stainless steel, with Extended Core

Product ID: U050AW30AEC1A
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U075AW29.5U product photo

U075AW29.5U

Product ID: U075AW295U
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352 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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