Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

Filter 10" HDC II 10µm

Product ID: AB1J1003J
Unit of Measure
6/EA
Min Order Qty
6

AB1J100-7H1

Product ID: AB1J1007H1
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" HDC II 40µm

Product ID: AB1J4007J
Unit of Measure
1/EA
Min Order Qty
1
Filter 10" HDC II 20µm product photo

Filter 10" HDC II 20µm

Product ID: AB1J2003H4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CTRG AB1 NM NAE C7 NAEH1 product photo

CTRG AB1 NM NAE C7 NAEH1

Product ID: AB1NA7EH1
Unit of Measure
1/EA
Min Order Qty
1

Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.45 µm Single Layer, 10 in, Single Open Ended Code 3, Silicone Elastomer O-ring

Product ID: AB1NB3WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.45 µm Single Layer, 10 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB1NB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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FEATURED

Emflon® PFRW Filter Cartridge, AB1PFR3WH4

Product ID: AB1PFR3WH4
Unit of Measure
1/EA
Min Order Qty
1

AB1RK7J

Product ID: AB1RK7J
Unit of Measure
1/EA
Min Order Qty
1

Emflon® PFRW Filter Cartridge, AB1PFR8WH4

Product ID: AB1PFR8WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
8000 cm²
Filter Cartridge Style
Code 8
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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AB1RZ8H4

Product ID: AB1RZ8H4
Unit of Measure
1/EA
Min Order Qty
1

CRTG AB1U2-20Z-7H

Product ID: AB1U220Z7H
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
976 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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