Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

Gasket / O-Ring Material

Fluorocarbon Elastomer

Duo-Fine®, Filter Cartridges, Removal Rating 0.45 μm

Product ID: DFPT0454EVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
End Configuration
SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0) 3
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Duo-Fine®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, FluorocarbonElastomer

Product ID: DFPT120EV
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Change Out Differential Pressure
2.4 bard
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Discontinued

This part is no longer available. Please contact us for more information.

Duo-Fine®, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches

Product ID: DFPT3020EV
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
30 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Change Out Differential Pressure
2.4 bard
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Duo-Fine®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, FluorocarbonElastomer, SOE flat closed end external 222 O-rings

Product ID: DFPT140EVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Duo-Fine®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, FluorocarbonElastomer, SOE fin end external 222 O-rings

Product ID: DFPT140EVM8
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M8
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Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 10 Inches, FluorocarbonElastomer, SOE flat closed end external 222 O-rings

Product ID: DFPT310EVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 10 Inches, FluorocarbonElastomer

Product ID: DFPT310EV
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Change Out Differential Pressure
2.4 bard
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Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 20 Inches, FluorocarbonElastomer

Product ID: DFPT320EV
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Change Out Differential Pressure
2.4 bard
See All Attributes

Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 40 Inches

Product ID: DFPT340EVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer, Bulk packaging

Product ID: U005AW30UVM3
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: XLD1040UVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Poly-Fine® XLD Filter Cartridges, Polypropylene, Length 10 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: XLD3010UVM3
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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213 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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