Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Media

Polypropylene

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, silicone, SOE fin end external 222 O-rings, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, silicone, SOE fin end external 222 O-rings, No Bubble Test

Product ID: PFT0820USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II Filter Cartridge, PFT0830UESIW480 product photo

Poly-Fine® II Filter Cartridge, PFT0830UESIW480

Product ID: PFT0830UESIW480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 222 O-rings

Product ID: PFT0830UEM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 222 O-rings

Product ID: PFT0830USM8
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Silicone Elastomer, SOE – single open end with fin end and external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Silicone Elastomer, SOE – single open end with fin end and external 222 O-rings

Product ID: PFT0830USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: PFT0830UVM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II Filter Cartridge, PFT0830UEM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT0830UEM7W480

Product ID: PFT0830UEM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 222 O-rings with locking tabs product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 222 O-rings with locking tabs

Product ID: PFT0830USM4
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT0830USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: PFT0830UVM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings

Product ID: PFT0830UT
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.8 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 226 O-rings

Product ID: PFT0840UEM7
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.8 µm
1,904 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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