Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Gasket / O-Ring Material

Nitrile

Duo-Fine®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Nitrile

Product ID: DFPT1040ENM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
M3
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Duo-Fine®, Filter Cartridges, Removal Rating 10 μm

Product ID: DFPT10195EN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Gasket / O-Ring Material
Nitrile
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
Gasket O-Ring Code
N
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Duo-Fine® II, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches

Product ID: DFPT330ENM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
M3
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, Polypropylene, Nitrile, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, Polypropylene, Nitrile, Bulk packaging

Product ID: U001AW20UNM3
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, Polypropylene, Nitrile product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, Polypropylene, Nitrile

Product ID: U005AW40UNM3
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Nitrile, DOE industrial

Product ID: XLD1010UNNET
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 10 inches, Nitrile, DOE industrial

Product ID: XLD1510UNNET
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
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Poly-Fine® XLD Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 20 inches, Nitrile, DOE industrial

Product ID: XLD1520UN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Nitrile
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Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches, Nitrile, DOE industrial

Product ID: XLD310UN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, Nitrile, DOE industrial

Product ID: XLD330UN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, Nitrile, DOE industrial

Product ID: XLD320UN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Nitrile
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Poly-Fine® XLD Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: XLD4020UNM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Nitrile
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Discontinued

This part is no longer available. Please contact us for more information.
210 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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