Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Type

Filter Cartridges

Gasket / O-Ring Material

NA

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 40 inches

Product ID: NXT10040U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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This product is currently not available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 9.75 inches, DOE Santoprene gasket seal

Product ID: NXT3975UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 10 inches

Product ID: NXT12010U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 50 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 50 inches

Product ID: CLR550
Unit of Measure
20/EA
Min Order Qty
20
Length
127 cm / 50 in
Micron
5 micron

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 39 inches

Product ID: NXA1039UH21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
39 in
Cartridge Length (Metric)
991 mm
Cartridge Length (Metric)
99.1 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 9.875 inches

Product ID: NXT1009875U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
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This product is currently not available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 inches

Product ID: NXT3040U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 4 inches

Product ID: NXA104U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Polypropylene, Length 10 inches

Product ID: NXA710U
Unit of Measure
30/EA
Min Order Qty
30
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
End Configuration Code
BLANK
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Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT3010UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 micron

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, SOE metal spring/polypropylene cap saw cut end

Product ID: CLR540SI
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXT4020UH21
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
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269 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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