Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Microelectronics

Product Type

Filter Cartridges

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: CLR120H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches

Product ID: CLR140
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
1 micron

R3F005

Product ID: R3F005TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
NXA 10-10U product photo

Nexis, NXA, 10 μm, 25.4 cm (10 in), DOE industrial (no end caps)

Product ID: NXA1010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
10 micron

RM2F007H21-COA

Product ID: RM2F007H21COATIMMD
Unit of Measure
1/EA
Min Order Qty
1

R1F1200

Product ID: R1F1200TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1
U030A10U product photo

U030A10U

Product ID: U030A10U
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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WFN 0.45-10US 300

Product ID: WFN04510US300
Unit of Measure
1/EA
Min Order Qty
1
Claris, Polypropylene, 50 micron, 9.75 inch product photo

Claris, Polypropylene, 50 micron, 9.75 inch

Product ID: CLR50975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
50 micron

AB2W00325J

Product ID: AB2W00325J
Unit of Measure
1/EA
Min Order Qty
1

WFN 0.45-30US-M7 300

Product ID: WFN04530USM7300
Unit of Measure
1/EA
Min Order Qty
1

AB1UY1007H1

Product ID: AB1UY1007H1
Unit of Measure
1/EA
Min Order Qty
1
315 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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