Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Cartridge Length (Imperial)

10 in

Filter Media

Polypropylene

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: PFT04510UVM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT04510USM7712
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer

Product ID: NXT15010UM18V
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
150 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: R1F400
Unit of Measure
6/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE flat closed end external 222 O-rings

Product ID: PFT0810UTM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: PFT04510UFM3420
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial

Product ID: PFT310UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings, Standard packaging product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings, Standard packaging

Product ID: PFT1010USM7425
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-ring

Product ID: NXT10010UM18V884
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT2010UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches

Product ID: NXT10010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
100 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, EPDM, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, EPDM, SOE fin end external 222 O-rings

Product ID: NXT1010UM8E
Unit of Measure
60/EA
Min Order Qty
60
Micron
10 micron
424 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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