Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

10 in

DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 10 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 10 Inches, Polypropylene

Product ID: U200A10U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: PFT04510UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
DFT Classic®, Filter Cartridges, Removal Rating 40 μm, Length 10 Inches, 316 stainless steel, with Extended Core, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 40 μm, Length 10 Inches, 316 stainless steel, with Extended Core, Individually wrapped

Product ID: G040A10SEC1S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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Poly-Fine® XLD Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 10 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: XLD1510UEM3165
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 10 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 10 Inches, 304 stainless steel

Product ID: C020A10A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings, No Bubble Test

Product ID: PFT0810UFM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial, No Bubble Test

Product ID: PFT04510UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 10 Inches, 316 stainless steel

Product ID: C003A10S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer

Product ID: NXT510UM18V
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Poly-Fine® II Filter Cartridge, PFT02510UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT02510UEW480

Product ID: PFT02510UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, Polypropylene

Product ID: U100A10U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: PFT0210UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
524 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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