Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Duo-Fine®

Industries

Industrial Manufacturing

Product Type

Filter Cartridges

Duo-Fine® , Filter Cartridges, Removal Rating 30 μm, Length 19.5 Inches, Nitrile, DOE 2.54 cm (1 in) extended core

Product ID: DFN30195UN1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
1X
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Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 40 Inches, silicone, SOE flat closed end external 222 O-rings

Product ID: DFN04540USM3
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
End Configuration Code
M3
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Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, silicone, DOE internal O-rings

Product ID: DFNT110USM10
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
1 µm
End Configuration
DOE, internal O-rings (fits other manufacturers’
Change Out Differential Pressure
2.4 bard

MPDF 1-40VEE

Product ID: MPDF140VEE
Unit of Measure
1/EA
Min Order Qty
1

Duo-Fine® II, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches

Product ID: DFPT330ETM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration Code
M3
End Configuration
SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0)3
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Duo-Fine® II, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, Nitrile

Product ID: DFNT120UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® II, Filter Cartridges, Removal Rating 10 μm

Product ID: DFN101401
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Change Out Differential Pressure
2.4 bard

Duo-Fine® , Filter Cartridges, Removal Rating 30 μm, Length 30 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN3030AN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine®, Filter Cartridges, Removal Rating 0.45 μm, Length 20 Inches, SOE fin end external 222 O-rings

Product ID: DFPT04520ETM8563
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
M8
End Configuration
SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5) 3
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Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: DFN130UNM3
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 20 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: DFNT04520UVM3
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Duo-Fine®, Filter Cartridges, Removal Rating 0.2 μm, FluorocarbonElastomer

Product ID: DFPT02311EVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
End Configuration
SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0) 3
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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191 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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