Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Duo-Fine®

Availability

In Stock

Product Type

Filter Cartridges

Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: DFNT1020UVM3
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

This product is currently not available. Please contact us for more information.

Duo-Fine® II, Filter Cartridges, Removal Rating 10 μm

Product ID: DFN101401V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Change Out Differential Pressure
2.4 bard

This product is currently not available. Please contact us for more information.

Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, Fluorocarbon Elastomer

Product ID: DFNT120UV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN1030AN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

This product is currently not available. Please contact us for more information.

Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches, SOE fin end, external 222 O-rings

Product ID: DFPT330EFM8563
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration Code
M8
End Configuration
SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5) 3
See All Attributes

Duo-Fine® II, Filter Cartridges, Removal Rating 3 μm, Length 10 Inches

Product ID: DFNT310UN221
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 20 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN320AN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Nitrile, DOE 2.54 cm (1 in) extended core

Product ID: DFN1030AN1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
1X
See All Attributes

This product is currently not available. Please contact us for more information.

Duo-Fine® II, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Nitrile

Product ID: DFNT1030UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

This product is currently not available. Please contact us for more information.

Duo-Fine® , Filter Cartridges, Removal Rating 30 μm

Product ID: DFN301401
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.6 in
Cartridge Outer Diameter (OD) (Metric)
6.6 cm
Packaging Type
Standard packaging

Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 20 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN04520UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

GP 30-10U-X4N 246

Product ID: GP3010UX4N246
Unit of Measure
1/EA
Min Order Qty
1
85 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English