Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Nexis®

Industries

Oil & Gas

Product Type

Filter Cartridges

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT120UM3V
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches

Product ID: NXT1040U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
10 micron

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT520UM7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, DOE 2.54 cm (1 in) extended core

Product ID: NXT2040N1XW865
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
End Configuration Code
1X
End Configuration
1X - DOE, 2.54 cm (1 in) extended core
Cartridge Type
NXT
Change Out Differential Pressure
2.4 bard
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Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches

Product ID: NXT340U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
3 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXT520UM3S
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, FEP encapsulated Fluorocarbon Elastomer Orings product photo

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, FEP encapsulated Fluorocarbon Elastomer Orings

Product ID: NXT0530UM26F
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXT0530U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
0.5 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXT1020UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 4 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT2004UM3V
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 5 inches

Product ID: NXT205U
Unit of Measure
1/EA
Min Order Qty
1
Micron
20 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT20020UM3V
Unit of Measure
1/EA
Min Order Qty
1
Micron
200 micron
103 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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