Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Poly-Fine®

Product Type

Filter Cartridges

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: PFT04520UVM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
See All Attributes
Poly-Fine® II Filter Cartridge, PFT04510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04510USM7W480

Product ID: PFT04510USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
PFT 0.45-20UE-M7W 480 product photo

PFT 0.45-20UE-M7W 480

Product ID: PFT04520UEM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II Filter Cartridge, PFT04530UESIW480 product photo

Poly-Fine® II Filter Cartridge, PFT04530UESIW480

Product ID: PFT04530UESIW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
PFT 0.45-30UEW 480 product photo

PFT 0.45-30UEW 480

Product ID: PFT04530UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 30 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings

Product ID: PFT04530UT
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes
Poly-Fine® II Filter Cartridge, PFT04540USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04540USM7W480

Product ID: PFT04540USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.45 µm
Poly-Fine® II Filter Cartridge, PFT04530USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04530USM7W480

Product ID: PFT04530USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, Ethylene Propylene Rubber, SOE – single open end with flat closed end and external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, Ethylene Propylene Rubber, SOE – single open end with flat closed end and external 222 O-rings

Product ID: PFT0810UEM3W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.8 µm

Discontinued

This part is no longer available. Please contact us for more information.
PFT 0.45-40US-M8W 480 product photo

PFT 0.45-40US-M8W 480

Product ID: PFT04540USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II Filter Cartridge, PFT0810UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT0810UEW480

Product ID: PFT0810UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II Filter Cartridge, PFT0810USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT0810USM7W480

Product ID: PFT0810USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.8 µm
213 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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