Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

Profile Code 19 20

Product ID: AB2P01019J
Unit of Measure
1/EA
Min Order Qty
1

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: R2F020
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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Profile® Nylon, Filter Cartridges, Removal Rating 5 μm, Nylon

Product ID: RGN29FN050
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Nylon
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm

Element 1" PROFILE STAR UNICAP 0.8µm NPL

Product ID: H1A1A0081JNPL
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

RLS1FPS200

Product ID: RLS1FPS200
Unit of Measure
1/EA
Min Order Qty
1

HC3310FPS40H

Product ID: HC3310FPS40H
Unit of Measure
12/EA
Min Order Qty
12

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: RM2F020H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
2 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Profile® II, Filter Cartridges, Polypropylene, Length 40 Inches

Product ID: R4F100
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
End Configuration
R type housing
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CTRG PRFLSTAR PIH 40" PPRO 070

Product ID: ME3310CPN40Z
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: RM1F050H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Profile® II Filter Cartridge

Product ID: HC3310FPN30H
Unit of Measure
48/EA
Min Order Qty
48

RM2F005H21-COA

Product ID: RM2F005H21COATIMMD
Unit of Measure
24/EA
Min Order Qty
48
538 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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