Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Ultipor®

Filter 30" Ultipor GF+ 6µm product photo

Filter 30" Ultipor GF+ 6µm

Product ID: MCY1003U6-40ZH13
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

5ESC10770-2U0045J-022

Product ID: P1122212
Unit of Measure
1/EA
Min Order Qty
1

5ESC10770-2U0005ZJ-096

Product ID: P2258899
Unit of Measure
1/EA
Min Order Qty
1

Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone

Product ID: AB3U100Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
Gasket O-Ring Code
H4
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W8T-150-30-U0005ZJ

Product ID: P2257665
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" Ultipor GF+ 1µm

Product ID: MCY1001U010ZH13
Unit of Measure
1/EA
Min Order Qty
1
5ESC10670-3U6-40ZJ-154 product photo

5ESC10670-3U6-40ZJ-154

Product ID: 5ESC106703U6S00001
Unit of Measure
1/EA
Min Order Qty
1

MCY4463NFWH4

Product ID: MCY4463NFWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Industry-Specific Certification
W480 Food Contact
Filter Cartridge Style
MCY-style junior
Gasket O-Ring Code
H4
Food Contact Compliant
Yes
O-Ring Seal
Silicone Elastomer
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Filter 10" Ultipor GF+ 3µm

Product ID: MCY1001U030ZH13
Unit of Measure
24/EA
Min Order Qty
24

WCN150FAR-20-U001ZJ

Product ID: WCN150FAR20U001ZJ
Unit of Measure
1/EA
Min Order Qty
1

PUY2U220ZJ

Product ID: PUY2U220ZJ
Unit of Measure
1/EA
Min Order Qty
1

Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone, 226 O-ring replacement size

Product ID: AB3U6-40Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
Gasket O-Ring Code
H4
See All Attributes

This product is currently not available. Please contact us for more information.

96 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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