Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Ultipor®

CRTG AB1U200Z-7J product photo

CRTG AB1U200Z-7J

Product ID: AB1U200Z7J
Unit of Measure
1/EA
Min Order Qty
1

WCN150HFU618UY020JU

Product ID: WCN150HFU618S00001
Unit of Measure
4/EA
Min Order Qty
4

Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.45 µm Single Layer, 10 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB1NB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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Filter 30" Ultipor GF+ 20µm product photo

Filter 30" Ultipor GF+ 20µm

Product ID: MCY1003U200ZH
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Junior Filter Ultipor GF+ 1µm

Product ID: MCY4463U010ZH4
Unit of Measure
24/EA
Min Order Qty
24

W6T080-30U2-20ZJ-129

Product ID: W6T08030U220ZJ129
Unit of Measure
1/EA
Min Order Qty
1

Ultipor® N66 Filter Cartridges, Nylon Hardware, 0.45 µm Single Layer, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: ABN3NB7BWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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Ultipor® GF Plus Filter Cartridges, Removal Rating 2 μm, Length 20 inches

Product ID: AB2U2-20Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
2 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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ELEMENT 8" U0045Z 0.45 MICRON product photo

ELEMENT 8" U0045Z 0.45 MICRON

Product ID: CA41077D11
Unit of Measure
1/EA
Min Order Qty
1

WCN150-20-U2-20ZJ

Product ID: WCN15020U220ZJ
Unit of Measure
1/EA
Min Order Qty
1
Filter 10" Ultipor GF+ 1µm product photo

Filter 10" Ultipor GF+ 1µm

Product ID: MCY1001U010ZH2
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

5ESC10770-3U200ZJ-160

Product ID: P1122934
Unit of Measure
1/EA
Min Order Qty
1
105 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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