Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Product Type

Accessories and Spare Parts

KIT ROD SEAL SPL

Product ID: ACS1106EX
Unit of Measure
1/EA
Min Order Qty
1

Flat gasket, Silicone 53/70x5mm, blue

Product ID: B7709010014
Unit of Measure
1/EA
Min Order Qty
1

KIT KCA69045

Product ID: KCA69045
Unit of Measure
1/EA
Min Order Qty
1

KIT KORJ7P-342

Product ID: KORJ7P-342
Unit of Measure
1/EA
Min Order Qty
1

MDS Junior Style Industrial Housings for 4463 and 2230 Style Cartridges, 6 mm (1⁄4 in.) NPT

Product ID: MDS4463GN4MFH4
Unit of Measure
1/EA
Min Order Qty
1

Palltronic® Compact Touch External Power Supply, CT001-EXTPWR

Product ID: CT001-EXTPWR
Unit of Measure
1/EA
Min Order Qty
1
Adapter Info
Includes EU, UK, US, AU adaptors

Palltronic® Blue Pneumatic Tubing (3m) with Stäubli fittings and vent valve (connects Compact Touch to test housing)

Product ID: CT001-OUTTUBING
Unit of Measure
1/EA
Min Order Qty
1
Connections
Staubli Coupling
Length (m)
3 m

Palltronic® Red Pneumatic Tubing (2m) with Stäubli fittings, CT001-INTUBING

Product ID: CT001-INTUBING
Unit of Measure
1/EA
Min Order Qty
1
Connections
Staubli Nipple
Length (m)
2 m

Palltronic® Compact Touch Thermal Printer Paper, CT001-PRTPAPER

Product ID: CT001-PRTPAPER
Unit of Measure
1/EA
Min Order Qty
1
Paper
Thermal
Paper Roll Diameter
45 mm
Paper Roll Length
25 m
Paper Roll Width
58 mm

Palltronic® Compact Touch Carry Case

Product ID: CT001-CCT
Unit of Measure
1/EA
Min Order Qty
1

Vent TC sight 2 ball valve 10

Product ID: D601719010
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

O-RING BS3601-242 FLUOROCARBON FDA USP3A

Product ID: GK1242PH01
Unit of Measure
1/EA
Min Order Qty
1
45 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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