Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Capsules

Supracap™ 50 depth filter capsule with activated carbon type AKS1 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS1 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections

Product ID: SC050XAK1
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
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Supracap™ 50 depth filter capsule with activated carbon type AKS5 (typical target contaminant molecular weight 200-400 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS5 (typical target contaminant molecular weight 200-400 Da) and luer-lock connections

Product ID: SC050XAK5
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
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Supracap™ 50 depth filter capsule with activated carbon type AKS4 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS4 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections

Product ID: SC050XAK4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
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Supracap™ 50 depth filter capsule with activated carbon type AKS6 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS6 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections

Product ID: SC050XAK6
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
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Supracap™ 50 depth filter capsule with single-layer media grade T1500P (11-30 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade T1500P (11-30 µm retention rating) and luer-lock connections

Product ID: SC050P1500
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
11-30 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
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Supracap™ 50 depth filter capsule with activated carbon type AKS7 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS7 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections

Product ID: SC050XAK7
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
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FSL315CAP  204 product photo

FSL315CAP 204

Product ID: FSL315CAP204
Unit of Measure
1/EA
Min Order Qty
1
DFA Capsule HDC II 6µm product photo

DFA Capsule HDC II 6µm

Product ID: DFA3001J060
Unit of Measure
6/EA
Min Order Qty
6
DFA Capsule HDC II 6µm product photo

DFA Capsule HDC II 6µm

Product ID: DFA4001J060
Unit of Measure
6/EA
Min Order Qty
6
DFA Capsule HDC II 20µm product photo

DFA Capsule HDC II 20µm

Product ID: DFA4001J200
Unit of Measure
6/EA
Min Order Qty
6
DFA Capsule Nylon66 0.1µm product photo

DFA Capsule Nylon66 0.1µm

Product ID: DFA4001NIEY
Unit of Measure
1/EA
Min Order Qty
1
Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation product photo

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Product ID: KA1EKVP1S
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Polyethersulfone (PES)
Effective Filtration Area
375 cm²
Sterilization Option(s)
Provided Pre-Sterilized by Gamma Irradiation
Inlet Connection
1-1½ in (25-38 mm) sanitary flange
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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