Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Cartridge Length (Imperial)

8 in

Seal Material

Fluorocarbon

Versalon, 1015psi Simplex Hsg, 1in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: HZF310A16CNSGDX160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
1015 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Versalon, 1015psi Simplex Hsg, 1in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZF310C16CSSS00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
1015 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

HZG210A10CSSG1X160 Assembly Filter

Product ID: HZG210A10CSSG1X160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
3625 psi
Port Size
0.625 in
Number of Cartridges
1
See All Attributes

Versalon, 6090psi Simplex Hsg, 1in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: HZG410A16CSSG1X160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
6090 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Versalon, 6090psi Simplex Hsg, 1.25in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZG410C20CNSGBX160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
6090 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.25in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UH210A2008ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

UH210A1608ZG ASSY HOUSING

Product ID: UH210A1608ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.25in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UH210A2008ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

UH210C1608ZG ASSY HOUSING

Product ID: UH210C1608ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: UH210C1608ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UH210A1608ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.25in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: UH210C2008ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes
118 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English