Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Family

Versalon

Seal Material

Fluorocarbon

Versalon Glass Fiber 25 micron (Beta 1000) Fluorocarbon 10in 25.4cm

Product ID: HCG300FCT10Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HCG300
Family
Versalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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Discontinued

This part is no longer available. Please contact us for more information.

Versalon, 3625psi Simplex Hsg, M22x1.5-6H THDin, 8in Length, Fluorocarbon Seals

Product ID: HZG210P22KDSG0X160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric ISO6149
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
3625 psi
Port Size
M22x1.5-6H THD in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.

Versalon, 6090psi Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: HZG410C16CSRG1X160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
6090 psi
Port Size
1 in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.
27 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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