Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Gasket / O-Ring Material

Silicone

Filter Media

Polypropylene

Profile® II Filter Cartridges, Polypropylene, Length 20 inches, A type housing with the same O-ring code

Product ID: AB2Y0503H4
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
506 mm
Cartridge Length (Metric)
50.6 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Profile® II Filter Cartridges, Polypropylene, Length 20 inches, silicone

Product ID: AB2Y4007H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
506 mm
Cartridge Length (Metric)
50.6 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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This product is currently not available. Please contact us for more information.

Profile® II, Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 Inches, silicone, Polypropylene Cage

Product ID: AB3Y0057H4
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
Silicone
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Profile® II, FilterCartridges, Removal Rating 1 μm, Polypropylene, Length 30 Inches, silicone

Product ID: AB3Y0107H4
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
Silicone
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Profile® II, FilterCartridges, Polypropylene, Length 30 Inches, silicone

Product ID: AB3Y2007H4
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, silicone, Polypropylene Cage

Product ID: AB3Y3007H4
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches

Product ID: ARD1030USM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 226 O-rings

Product ID: ARD140USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, silicone

Product ID: ARD510USM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, silicone product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, silicone

Product ID: NXA0510UM3S
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
NXA 0.5-10U-M7S product photo

Nexis, NXA, 0.5 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA0510UM7S
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, silicone product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, silicone

Product ID: NXA0520UM7S
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.5 micron
184 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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