Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Microelectronics

WF4P00318J

Product ID: WF4P00318JTIMONIUM
Unit of Measure
12/EA
Min Order Qty
12
NXT 200-20U-H21 product photo

Nexis, NXT, 200 μm, 50.8 cm (20 in), DOE, Santoprene gasket seal

Product ID: NXT20020UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
200 micron
NXT 0.5-10U-M7E product photo

Nexis, NXT, 0.5 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), EPDM gasket

Product ID: NXT0510UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron

CRTG R19F300

Product ID: R19F300
Unit of Measure
24/EA
Min Order Qty
24

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: RM1F900H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
90 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
See All Attributes

AB2P01019J

Product ID: AB2P01019JTIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, EPDM, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, EPDM, SOE fin end external 222 O-rings

Product ID: NXT130UM8E
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
NXA 40-10U-M7S product photo

Nexis, NXA, 40 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA4010UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
40 micron

NXT 75-19.5U

Product ID: NXT75195U
Unit of Measure
10/EA
Min Order Qty
10

WF4P20018H13

Product ID: WF4P20018H13TIMMD
Unit of Measure
12/EA
Min Order Qty
12

AB1Y0303J

Product ID: AB1Y0303JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

Y700FS10

Product ID: Y700FS10TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1
201 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English