Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Microelectronics

Product Type

Filter Cartridges

PUY1UY1000J

Product ID: PUY1UY1000J
Unit of Measure
1/EA
Min Order Qty
1

AB04P00319J

Product ID: AB04P00319JTIMMD
Unit of Measure
1/EA
Min Order Qty
1
U010AW20U product photo

U010AW20U

Product ID: U010AW20U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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NXT 1-10U-M3E

Product ID: NXT110UM3E
Unit of Measure
30/EA
Min Order Qty
60

MCY1001W003J 254

Product ID: MCY1001W003J254
Unit of Measure
1/EA
Min Order Qty
1

MPGH02120

Product ID: MPGH02120400
Unit of Measure
1/EA
Min Order Qty
1

Y100FS10

Product ID: Y100FS10TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

CRTG EA92F2MS

Product ID: EA92F2MS
Unit of Measure
1/EA
Min Order Qty
1

R2F700

Product ID: R2F700TIMONIUM
Unit of Measure
24/EA
Min Order Qty
48
U025AW29.5U product photo

U025AW29.5U

Product ID: U025AW295U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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Profile® Star Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, Ethylene Propylene, double O-ring with flat end

Product ID: AB2A0103J
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
1 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 3
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: RM2F003H21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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315 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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