Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

Cartridge Length (Metric)

762 mm

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA530UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 30 Inches, Electrolytic tin plated steel, with Core Cover product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 30 Inches, Electrolytic tin plated steel, with Core Cover

Product ID: C05AW30TC
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Polyester, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Polyester, Length 30 Inches

Product ID: E005AW30A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 30 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 30 Inches, Polypropylene

Product ID: U05AW30UC
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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This product is currently not available. Please contact us for more information.

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, Polypropylene, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, Polypropylene, Bulk packaging

Product ID: C005AW30U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 30 Inches, Electrolytic tin plated steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 30 Inches, Electrolytic tin plated steel

Product ID: C100AW30T
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, FEP encapsulated fluorocarbon elastomer Orings product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, FEP encapsulated fluorocarbon elastomer Orings

Product ID: NXA2030UM8F
Unit of Measure
1/EA
Min Order Qty
1
Micron
20 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT530UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron

Profile® Nylon, Filter Cartridges, Removal Rating 40 μm, Nylon, Length 30 Inches

Product ID: RGN3FN400
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
40 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Timonium

Product ID: RM3F200H21TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE 2.54 cm (1 in) extended core product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE 2.54 cm (1 in) extended core

Product ID: NXT130U1X
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Timonium

Product ID: R3F050TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
R type housing
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182 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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