Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Sub Type

Depth Filters

Product Type

Filter Cartridges

Product Use

Pre-Filtration

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, EPDM product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, EPDM

Product ID: NXA0530UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.5 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, silicone, SOE fin end, external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, silicone, SOE fin end, external 226 O-rings

Product ID: NXT1030UM7S
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
NXA 10-29.25U-DOEV product photo

Nexis, NXA, 10 μm, 74.3 cm (29.25 in), DOE with elastomer gasket seals and end caps, Fluorocarbon Elastomer gasket

Product ID: NXA102925UDOEV
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron
NXT 100-30U-M7E product photo

Nexis, NXT, 100 μm, 76.2 cm (30 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), EPDM gasket

Product ID: NXT10030UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 micron
Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 16.25 inches

Product ID: NXT1501625UM3F
Unit of Measure
12/EA
Min Order Qty
12
Micron
150 micron
Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT3030UH21
Unit of Measure
10/EA
Min Order Qty
10
Micron
30 micron
NXA 1-20U-M8E product photo

Nexis, NXA, 1 μm, 50.8 cm (20 in), SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5), EPDM gasket

Product ID: NXA120UM8E
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
NXA 30-19.75U-H21 product photo

Nexis, NXA, 30 μm, 50.2 cm (19.75 in), DOE, Santoprene gasket seal

Product ID: NXA301975UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT1040UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
NXT 40-10U-M7S product photo

Nexis, NXT, 40 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXT4010UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
40 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 9.75 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 9.75 inches

Product ID: NXA05975UH21
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess product photo

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess

Product ID: NXT0510UM20E
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
295 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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